If I was you I would explicitly thank both the Prof, and the University (or perhaps the Department)
The Author(s) gratefully acknowledge the support of Professor ZZZ and The University of YYY for providing access to fabricate and measure the devices presented in this paper.
or We gratefully acknowledge Professor ZZZ and The XXX group at the University of YYY for providing support and access to equipment to allow the fabrication and measurement of the devices presented in this paper.