저 자신, 나 자신, 제 자신, 내 자신 are all used.
To be accurate, 저 자신, 나 자신 is correct and 제 자신, 내 자신 isn't correct grammatically. (However, all of them are widely used and accepted as National Institute of the Korean Language.)
First, there is a difference between 저/제 and 나/내.
저/제 are more polite expressions. It is used in a formal situation(ex. job interview) or a talk with a superior(/elder).
나/내 are for almost every situation except when 저/제 aren't necessary.
Second, there is a difference between 나/저 and 제/내.
나/저 are basic forms.
제 is a combination of 저 + 가.
내 is a combination of 나 + 가.
'가' is a postpositional word that tells you the noun with it is used as a subject or a complement.
You can also say that 제 is a combination of 저 + 의, 내 is a combination of a 나 + 의.
'의' is a postpositional word telling the noun is the possessive case in the sentence.