『夕食』の方がよく使われていると思います。＾＾

When it comes to frequency of use in daily life, they all are very common. We use all of them often. The difference is too small to worry, but worth learning of course. Basically 夕食 is more formal just like 朝食 and 昼食. 夕ごはん and 夜ごはん both mean “dinner” but if it was at the midnight, 夕ごはん is strange. It depends on to whom or when you talk. About 夜食 it is right as mentioned above.