Report The results of F1, in which the concentration 4% and feed rate was 3, indicated that the particle size was 3 nm and distribution was 2.3 nm. For F2, which has the concentration 3% and feed rate was 5, the results showed that particle size and distribution was 1 nm and 1.2 nm, respectively. At higher feed rate can generate the large particles. Because of increasing feed rate, lowers the outlet temperature and thus increase the temperature difference between the inlet and outlet temperature. Feed rate also determines the duration of the process for which one expose the high temperature. An increase in feed rate cause reduction in particle size. Corresponding to the concentration, the higher concentration of spray solution produce enlarge particles.